A novel mems motor based on thermal actuation

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dc.contributor.authorDe Silva, AHTE
dc.contributor.authorDe Silva, DDN
dc.contributor.authorPerera, KDCJ
dc.contributor.authorPriyashantha, AMB
dc.contributor.authorSampath, LLR
dc.contributor.authorDarshan, P
dc.contributor.authorJayathilaka, WADM
dc.contributor.authorAmarasinghe, YWR
dc.contributor.editorJayasekara, AGBP
dc.contributor.editorBandara, HMND
dc.contributor.editorAmarasinghe, YWR
dc.date.accessioned2022-09-08T09:03:20Z
dc.date.available2022-09-08T09:03:20Z
dc.date.issued2016-04
dc.description.abstractIt is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.en_US
dc.identifier.citationA. H. T. E. De Silva et al., "A novel MEMS motor based on thermal actuation," 2016 Moratuwa Engineering Research Conference (MERCon), 2016, pp. 48-53, doi: 10.1109/MERCon.2016.7480114.en_US
dc.identifier.conference2016 Moratuwa Engineering Research Conference (MERCon)en_US
dc.identifier.departmentEngineering Research Unit, University of Moratuwaen_US
dc.identifier.doi10.1109/MERCon.2016.7480114en_US
dc.identifier.emailahteranga@gmail.comen_US
dc.identifier.emaildashankadesilva@gmail.comen_US
dc.identifier.emailchamikajp@gmail.comen_US
dc.identifier.emailbpriyashantha@live.comen_US
dc.identifier.emailsruwan25@gmail.comen_US
dc.identifier.emaildarsan1991@gmail.comen_US
dc.identifier.emaildumithjayathilaka@gmail.comen_US
dc.identifier.emailranama@mech.mrt.ac.lken_US
dc.identifier.facultyEngineeringen_US
dc.identifier.pgnospp. 48-53en_US
dc.identifier.placeMoratuwa, Sri Lankaen_US
dc.identifier.proceedingProceedings of 2016 Moratuwa Engineering Research Conference (MERCon)en_US
dc.identifier.urihttp://dl.lib.uom.lk/handle/123/18989
dc.identifier.year2016en_US
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.relation.urihttps://ieeexplore.ieee.org/document/7480114en_US
dc.subjectMEMSen_US
dc.subjectMicro motoren_US
dc.subjectKink actuatoren_US
dc.subjectReciprocating rack and pinionen_US
dc.titleA novel mems motor based on thermal actuationen_US
dc.typeConference-Full-texten_US

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