Browsing by Author "De Silva, DDN"
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- item: Conference-Full-textA novel mems motor based on thermal actuation(IEEE, 2016-04) De Silva, AHTE; De Silva, DDN; Perera, KDCJ; Priyashantha, AMB; Sampath, LLR; Darshan, P; Jayathilaka, WADM; Amarasinghe, YWR; Jayasekara, AGBP; Bandara, HMND; Amarasinghe, YWRIt is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.